The accelerator seminar “The Last Light Source” “Coherence reduction in accelerator-based lithography systems”

Date

2024/01/30 13:30 – 15:30

Venue

Tsukuba controll room 1F Meeting room, Large + Zoom

Speaker

Dr. Erik R. Hosler(CEO of xLight, Inc.) Dr. Patrick P. Naulleau (CEO of EUV Tech Inc. and LBNL)

Language

English

URL

Contact

H. Kawata (PHS 4363), R. Kato (PHS 4910), T. Tanikawa (PHS 4126)


Overview

Abstract and Career of Dr. Dr. Erik R. Hosler (xLight, Inc.)
https://conference-indico.kek.jp/event/251/contributions/4778/attachments/3286/4487/Abstract_Erik%20R.%20Hosler.pdf

Abstract and Career of Dr. Patrick P. Naulleau (EUV Tech Inc, LBNL)
https://conference-indico.kek.jp/event/251/contributions/4780/attachments/3283/4491/Abstract_Patrick%20Naulleau.pdf

Release date 2024/01/09 Updated 2024/03/02